Info
Info
News Article

Memsstar Ships MEMS Production System To University Of Freiburg

News

memsstar, a provider of etch and deposition equipment to manufacturers of semiconductors and microelectrical mechanical systems (MEMS), has announced shipment of its three-chamber ORBIS 3000 system for MEMS research and manufacturing to the Department of Microsystems Engineering (IMTEK) at the University of Freiburg, Germany. As part of the nationally funded project, “Processes and Materials for More-than-Moore Electronic Systems (PROMYS),” memsstar's surface micromachining cluster tool will serve as a central unit for the micromechanical structuring of MEMS components for up to 200mm wafers.

PROMYS is one of 12 projects funded by the Germany Federal Ministry of Education and Research (BMBF) as part of the ForLab (Microsystems Research Laboratory - Germany) initiative. Its research aims to develop IoT solutions, particularly for the application area of medical aids and biological analytical microsystems. The motivation is to defend against degenerative diseases and to enable anywhere-care solutions, for example. The memsstar ORBIS tool will be a key component in achieving heterointegration of all kinds of micromachined sensors and actuators, together with microelectronics and media access, such as fluidic components.

“This project strongly showcases ORBIS' capabilities and our approach to working with our customers to develop processes that address their specific requirements,” said Tony McKie, CEO of memsstar. “The work being done at Freiburg is truly leading edge, and requires the advanced control and capabilities of our technology to meet the varied application requirements in production there.”

Prof. Alfons Dehe, holding the endowed Georg H. Endress Professorship for Smart Systems Integration, inspires researchers to co-integrate a range of MEMS and semiconductor technologies into systems in order to greatly reduce their size or enable functions that were not previously possible. This includes materials, nano-sized sensor elements and interconnection solutions merged in a seamless fabrication flow form, e.g., ultra-small environmental sensor systems.

“The ForLab initiative triggers numerous research collaborations between universities, Fraunhofer institutes and Hahn-Schickard,” commented Prof. Dehe, also director of the Hahn-Schickard Institute in Villingen-Schwenningen. “Hence, we bridge fundamental research into applications. We not only transfer results to industry, but bridge the gap of small quantity production to SMEs. The memsstar platform offers unique technologies for advanced process control, with faster process times, denser, more robust films, superior within-wafer uniformity and wafer-to-wafer repeatability.”

Introduced in 2014, memsstar's ORBIS systems deliver the industry's most advanced single-wafer process capability for advanced MEMS manufacturing. It includes fully integrated process monitoring and endpoint control, a high-selectivity package and a proven hardware that delivers excellent uniformity and repeatability, critical to improving yield.

SSI International 2020 - New Dates Announced.

JOIN THE MARKET LEADING GLOBAL SENSORS CONFERENCE AND EXHIBITION TODAY!

In its fourth year, Sensor Solutions International is fast becoming one of the must attend events on the sensors industry calendar!

Co-located with the highly prestigious CS International and PIC International conferences, SSI International is part of AngelTech, which delivers a portfolio of insightful, informative, highly valued chip-level conferences.

Bringing together 3 conferences, 800+ delegates, 80+ exhibitors, 120+ presentations and numerous networking opportunities, AngelTech is the number one global event covering compound semiconductor, photonic integrated circuit and sensor technologies. With a strong over-lap between the three conferences, attendees and exhibitors are exposed to the full relevant supply chains and customer and supplier bases.

ACT NOW – LESS THAN 85 TICKETS REMAINING

View Agenda    Register your place here
“Sensorized” Skin Helps Soft Robots Find Their Bearings
Osram Presents New Infrared Laser For Short-range LiDAR Applications
High-end Inertial Sensors: At The Dawn Of A Mass-adoption?
Industries Lowest Current-Voltage 2-Wire Inductive Proximity Sensor
FLIR Systems And Foresight Sign Agreement To Develop, Market And Distribute QuadSight Vision System
Sensor City Launch ‘discovery’ Programme To Help SMEs Adopt Digital Technologies
Maxim Integrated Accelerates Innovation In Europe With $25M Investment
Osram Presents New IR Laser For Short-range LiDAR
Innoviz Selected For Autonomous Truck Project At A Chinese Port
Breast Screening Breakthrough To End Unnecessary Biopsies
ADASKY Wins Contract To Supply Thermal Camera For An Autonomous EV OEM
TomTom, TRI-AD And DENSO Collaborate On Advanced Mapmaking For Automated Driving
Teledyne E2v To Continue To Develop And Manufacture High Specification CCD Image Sensors
GSS Expands Portfolio With Evaluation Kits
Velodyne Lidar Appoints Mathew Rekow As New CTO
Allegro Pioneers The First Back-biased GMR Transmission Speed & Direction Sensor
Yole Forecasts Growth Of Rear 3D Sensing
CEA-Leti’s Energy-Harvesting ICs Point The Way To Battery-Free Sensor Systems
Protective Clothing With Built-in Sensors
Cepton Receives $50 Million Investment From Koito
RoboSense Obtains IATF 16949 Certification
Renesas Gas Sensor Enables Safera’s Smart Cooking Sensor
Waymo Introduces The Fifth-generation Of Its Self-driving System
Eyesight And Ariel University Deploying Mobile Laboratory To Research The Driver’s State Behind The Wheel

Info
×
Search the news archive

To close this popup you can press escape or click the close icon.
Logo
×
Logo
×
Register - Step 1

You may choose to subscribe to the Sensor Solutions Magazine, the Sensor Solutions Newsletter, or both. You may also request additional information if required, before submitting your application.


Please subscribe me to:

 

You chose the industry type of "Other"

Please enter the industry that you work in:
Please enter the industry that you work in:
 
X
Info
X
Info
{taasPodcastNotification}