Info
Info
News Article

Thin Film Quality Control For MEMS & Sensor Fabrication

News

SENTECH Instruments is a supplier of plasma process technology equipment for etching and deposition and thin film metrology instruments based on spectroscopic ellipsometry.

SENTECH proudly presents the SENDURO®MEMS for fully automatic metrology quality control in sensor and MEMS production. The SENDURO®MEMS provides reliable and precise measurement of thin film stacks, using spectroscopic reflectometry and ellipsometry.

Customized Measurement Equipment
The SENDURO®MEMS equipped with reflectometer is for fast thin film measurement. Combined with a spectroscopic ellipsometer measurements of film thickness and optical constants, and the analysis of multi-layer stacks are featured. The SENDURO®MEMS can be configured with μ-spot measurements in reflectometry and ellipsometry, and pattern recognition which provides the accurate measurement location. All measurements can be combined with the edge grip technology.

Highest flexibility and accuracy in terms of thin film analysis is provided by combination of spectroscopic reflectometry and spectroscopic ellipsometry based on SENTECH most accurate Step Scan Analyzer measurement mode. It is operated by the SENTECH comprehensive SpectraRay/4 software. The SECS/GEM software interface option supports the communication between factory host (MES) and production equipment (SENDURO®MEMS).

Automated wafer handling
The SENDURO®MEMS allows the handling of double-sided wafers. Edge grip wafer handling with small edge exclusion is optionally available for 100 mm, 150 mm, and 200 mm wafers.

The tool is equipped with robot and pre-aligner for automated wafer loading using cassettes.

Single point and multiple point measurements are supported by up to 200 mm x-y mapping. Pattern recognition is available for microspot spectroscopic ellipsometry (100 x 100 μm2) and microspot reflectometry (80 μm2).

Measurement of large variety of materials
The SENDURO®MEMS is a fully automated thin film metrology tool for measurement of a large variety of materials such as silicon oxide, silicon nitride, silicon oxynitride; amorphous silicon, polysilicon; photoresist, polyimide; thin metal films of Al, Pt, Cr and conductive films of TiN, TaN, TCO and ITO; single films and layer stacks of these materials on silicon wafers, silicon-on insulator substrates, silicon membranes, GaN on silicon, SiC, and more, used in MEMS and sensor production.

The SENDURO®MEMS is perfectly suited to optimize measurement speed, accuracy, and spot size by combination of ellipsometry and reflectometry in one tool. For MEMS and sensor fabrication industry this system is a cost effective asset.

Ouster Achieves Major Automotive Grade Milestone
China’s First Automotive-grade Solid-state LiDAR Production Line Launched
Teledyne Imaging’s New Z-Trak2 Family Of 3D Profile Sensors
3D-Micromac Unveils Laser Annealing System For Magnetic Sensor Manufacturing
Siemens Selects XenomatiX Technology To Validate Simulations For Autonomous Vehicle Applications
InnoSenTs Radar System For Measuring Filling Levels And Avoiding Collisions
New Motion Detector With Distance Measurement
Sensors For The Safety Of Your Guitar
Mitsubishi Electric To Launch 80x60 Pixel Thermal Diode Infrared Sensor
Plus Commits To Deploy Ouster’s Digital Lidar Sensors
HELLA Brings Latest Passenger Car 77GHz Radar Technology Into Series Production
Faraday Future Selects Velodyne As Exclusive Lidar Supplier For Flagship FF 91
New Wireless Torque Technology
TuSimple And Aeva Partner To Deploy 4D LiDAR For Autonomous Trucking
Continental And Iteris Collaborate To Explore Intelligent Infrastructure Technology
LEM Launches New Leakage Current Sensor For Electric Vehicle Charging Stations
SAIC Motor Launches R Brand EV Line Powered By Luminar For Series Production
May Mobility Selects Ouster’s Lidar Sensors For Autonomous Shuttle Platform
RoboSense Teams Up With Webasto On Smart Roof Module With Integrated MEMS LiDAR
New Inertial Sensor For High-performance Motion Detection
Torc Robotics Selects AWS As Preferred Cloud Provider For Self-driving Truck Fleet
Online Event Globalizing The Power Of Digital Olfaction Through Standards & Protocols
Melexis Announces World-First Combined Sensor For Smart Tires
Graphene Flagship’s Grapheal Raises €1.9 Million To Develop Biosensors And Fast Digital COVID Tests
×
Search the news archive

To close this popup you can press escape or click the close icon.
Logo
×
Logo
×
Register - Step 1

You may choose to subscribe to the Sensor Solutions Magazine, the Sensor Solutions Newsletter, or both. You may also request additional information if required, before submitting your application.


Please subscribe me to:

 

You chose the industry type of "Other"

Please enter the industry that you work in:
Please enter the industry that you work in:
 
X
Info
X
Info
{taasPodcastNotification}
Live Event